Rapid prototyping process based on the use of an intelligent pinhole mask and 193 nm excimer laser used to fabricate polymer microfluidic devices

ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings

Volumn 102, Issue , 2009, Pages 1092-1098

  Conlisk, Kevin ^a   Sherlock, Richard ^a   O'Connor, Gerard M ^a   Glynn, Thomas J ^a  

^a NATIONAL UNIVERSITY OF IRELAND   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; FABRICATION; FLUIDIC DEVICES; LASER ABLATION; MICROCHANNELS; RAPID PROTOTYPING; USER INTERFACES;

193 NM EXCIMER LASERS; COMPLEX GEOMETRIES; INTELLIGENT PINHOLE MASKS; LASER PROTOTYPING; MICRO-FLUIDIC DEVICES; MICROCHANNEL JUNCTIONS; POLYMER MICROFLUIDIC DEVICES; UNDESIRABLE EFFECTS;

MICROFLUIDICS;

EID: 77953886191     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2351/1.5061457     Document Type: Conference Paper

References (9)

1. Frost & Sullivan. (2006) U.S Microfluidics / Labon-a-chip Markets.
2. Ahn, C., & Choi, J.W. (2004) Microfluidics and their applications to lab-on-a-chip, in K.U., in Springer Handbook of Nanotechnology, Springer-Verlag, 253-278.
3. Kricka, L.J., Fortina, P., Panaro, N.J., Wilding, P., Alonso-Amigo, G., & Becker, H. (2002) Fabrication of plastic microchips by hot embossing, Lab on a Chip 2, 1-4.
4. Steigert, J., Haeberle, S., Brenner, T., Muller, C, Steinert, C.P., Koltay, P., Gottschlich, N., Reinecke, H., Ruhe, J., Zengerle, R., & Ducree, J. (2007) Rapid prototyping of microfluidic chips in COC, Journal of Micromechanics and Microengineering 17, 333-341.
5. Klank, H., Kutter, J.P., & Geschke, O. (2002) CO2-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic systems, Lab on a Chip 2, 242-246.
6. Lim, D., Kamotani, Y., Cho, B., Mazumder, J., & Takayama, S. (2003) Fabrication of microfluidic mixers and artificial vasculatures using a high-brightness diode-pumped Nd:YAG laser direct write method, Lab on a Chip 3, 318-323.
7. Lasser, T., Lopez, A., Sidler, T., Favre, S., & Gianotti, R. (2007) United States Patent Application 20070285813.
8. th Microoptics conference, Jena, Germany.
9. Koesdjojo, M.T., Tennico, Y.H. & Remcho, V.T. (2008) Fabrication of a microfluidic system for capillary electrophoresis using a two-stage embossing technique and solvent welding on Poly(methyl methacrylate) with water as a sacrificial layer, Analytical Chemistry 80, 2311-2318.