Time resolved spectroscopic characterization of a-C: H deposition by methane and removal by oxygen inductively coupled RF plasma

Plasma Chemistry and Plasma Processing

Volumn 30, Issue 3, 2010, Pages 401-412

  Biscan M ^a   Kregar, Z ^a   Krstulovic N ^a   Milosevic S ^a  

^a INSTITUTE OF PHYSICS   (Croatia)

Author keywords

Amorphous hydrogenated carbon; Methane plasma; Optical emission spectroscopy; Oxygen plasma cleaning; Plasma sterilization

Indexed keywords

AMORPHOUS HYDROGENATED CARBON; CLEANING PRODUCTS; DISCHARGE TUBE; GLASS TUBES; INDUCTIVELY COUPLED RF PLASMA; INDUCTIVELY-COUPLED; METHANE PLASMA; OXYGEN PLASMAS; PLASMA STERILIZATION; PLASMA-INDUCED; PURE OXYGEN PLASMA; RADIO FREQUENCIES; SPECTROSCOPIC CHARACTERIZATION; TIME EVOLUTIONS; TIME-RESOLVED; TOTAL GAS PRESSURE;

AMORPHOUS CARBON; AMORPHOUS FILMS; CARBON FILMS; DEPOSITION; ELECTRIC DISCHARGES; ELECTROMAGNETIC INDUCTION; EMISSION SPECTROSCOPY; HYDROGENATION; LIGHT EMISSION; LIGHT TRANSMISSION; METHANE; OPTICAL EMISSION SPECTROSCOPY; ORGANIC POLYMERS; OXYGEN; PHOTORESISTS; PLASMAS; PRESSURE MEASUREMENT; STERILIZATION (CLEANING); THIN FILMS;

PLASMA DEPOSITION;

EID: 77953621765     PISSN: 02724324     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11090-010-9226-7     Document Type: Article

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