Drift study of SU8 cantilevers in liquid and gaseous environments

Ultramicroscopy

Volumn 110, Issue 6, 2010, Pages 596-598

  Tenje, Maria ^a   Keller, Stephan ^a   Dohn, Søren ^a   Davis, Zachary J ^a   Boisen, Anja ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Cantilever based sensors; Drift; Optical readout; SU8

Indexed keywords

CANTILEVER BASED SENSORS; CANTILEVER DEFLECTION; GASEOUS ENVIRONMENTS; HYDROPHOBIC COATINGS; IN-VACUUM; OPTICAL READOUT; RELEASE LAYER;

ATOMIC FORCE MICROSCOPY; LIQUIDS; SENSORS; VACUUM;

NANOCANTILEVERS;

ABSORPTION; ANALYTIC METHOD; ARTICLE; ATOMIC FORCE MICROSCOPY; BIOSENSOR; CANTILEVER; ENCAPSULATION; GAS; HYDROPHOBICITY; LIQUID; PH; PROCESS OPTIMIZATION; STRUCTURE ANALYSIS; SURFACE PROPERTY; WATER ABSORPTION;

EID: 77953539914     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2010.02.017     Document Type: Article

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