Three-dimensional nanofabrication using focused ion beams

Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice

Volumn , Issue , 2005, Pages 73-86

  Kaito, Takashi ^a  

^a SEIKO INSTRUMENTS INC   (Japan)

Author keywords

3D CAD data; 3D nanofabrication; Carbon deposition; FIB CVD

Indexed keywords

EID: 77952920555     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/0-387-23313-X_4     Document Type: Chapter

References (8)

1. Kaito T, Nakagawa Y, Sato M, and Yamamoto M, "Carbon Pattern Film Fabrication by Focused Ion Beam Chemical Vapor Deposition", Proc. of Japan Society of Applied Physics 14p-T-15,265 (1984 Autumn).
2. Kaito T and Adachi T, "Property of Tungsten Film fabricated by Focused Ion Beam Chemical Vapor Deposition", Proc. of Japan Society of Applied Physics 4a-2-9,339 (1986 Spring).
3. Kaito T and Yamamoto M,"Mask Repair using Focused Ion Beam", Proc. of the 9 th Symp. On ISIAT 207 (1985).
4. Kaito T,Adachi T, and Kobayashi K,"Circuit Modification and Failure Analysis on IC Chip using Focused Ion Beam Chemical Vapor Deposition and Milling", Proc. of Japan Society of Applied Physics 28a-ZG-10,348 (1986 Autumn).
5. Kaito T and Adachi T, "Focused Ion Beam System for IC Development and Its Applications", Proc. of the 1st Micro Process Conference 142 (1988).
6. Matsui S, Kaito T, Fujita J, Komuro M, Kanda K and Haruyama Y, "Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition", J. Vac. Sci. Technol. B 18,3 18 1 (2000).
7. Yagyu T, Watanabe M, Tanaka K, Taniguchi M, Kaito T and Nishikawa 0,"Correration between the STM Images and the Open End of the Scanning Electrode of a Scanning Atom Probe", Proc. of Japan Society of Applied Physics 13p-ZW-6,507 (2001 Autumn).
8. Yasutake M and Kaito T, Proc. of Japan Society of Applied Physics 25a-ZQ-7, 590 (2002 Autumn).