A silicon nitride microdisk resonator with a 40-nm-thin horizontal air slot

Optics Express

Volumn 18, Issue 11, 2010, Pages 11209-11215

  Lee, Shinyoung ^a   Eom, Seok Chan ^a   Chang, Jee Soo ^a   Huh, Chul ^c   Sung, Gun Yong ^c   Shin, Jung H ^a,b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Graduate School of Nanoscience and Technology   (South Korea)

^c Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

RESONATORS; SILICON OXIDES; VIDEODISKS; WET ETCHING;

AIR SLOT; DEPOSITION PROCESS; E-FIELD; MICRODISK RESONATORS; Q-FACTORS; SELECTIVE WET ETCHING; SI CHIPS; SLOT STRUCTURES;

SILICON NITRIDE;

SILICON DERIVATIVE; SILICON NITRIDE;

ARTICLE; CHEMISTRY; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; NANOTECHNOLOGY; OPTICAL INSTRUMENTATION; REFRACTOMETRY; TRANSDUCER; VIBRATION;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MINIATURIZATION; NANOTECHNOLOGY; OPTICAL DEVICES; REFRACTOMETRY; SILICON COMPOUNDS; TRANSDUCERS; VIBRATION;

EID: 77952825700     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.011209     Document Type: Article

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