Multi-band RF filter integrating different modes of AlN resonator by CMOS-compatible process

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2009, Pages 2141-2144

  Matsumura, Takeshi ^a,b   Esashi, Masayoshi ^b   Harada, Hiroshi ^a   Tanaka, Shuji ^b  

^a NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATIONS TECHNOLOGY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

CMOS MEMS; Disk type resonator; FBAR; Multi band filter; RF MEMS

Indexed keywords

ACOUSTIC RESONATORS; ALUMINUM NITRIDE; CMOS INTEGRATED CIRCUITS; DISKS (MACHINE COMPONENTS); III-V SEMICONDUCTORS; MICROELECTROMECHANICAL DEVICES; SILICON WAFERS;

CMOS-MEMS; DISK-TYPE RESONATORS; FBAR; MULTIBAND FILTERS; RF-MEMS;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 77952794188     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2009.5442012     Document Type: Conference Paper

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