Polycarbosilane-derived silicon carbide MEMS component fabricated by slip casting with SU8 micro mold

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 416-419

  Ishikawa, T ^a   Namazu, T ^a   Yoshiki, K ^a   Inoue, S ^a   Hasegawa, Y ^b  

^a UNIVERSITY OF HYOGO   (Japan)

^b Art Kagaku Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICRO MOLDS; MICRO-SCALES; NANO POWDERS; NEW PRODUCTION; POLYCARBOSILANES; POROUS TUNGSTEN; SIC CERAMICS; SLIP CASTING;

CERAMIC MATERIALS; MECHANICAL ENGINEERING; MECHANICS; MOLDS; POLYSILANES; POROUS PLATES; REACTIVE ION ETCHING; TUNGSTEN; TUNGSTEN CARBIDE;

SILICON CARBIDE;

EID: 77952780386     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442476     Document Type: Conference Paper

References (4)

1. R. Ramachandra Rao and T.S. Kannan, "Slip cast nitride-bonded silicon carbide bodies", Materials Chemistry and Physics, Vol. 75, pp. 270-275, 2002.
2. Y. Hasegawa, "New curing method for polycarbosilane with unsaturated hydrocarbons and application to thermal stable Si-C fibre", Composites Science and Technology, Vol. 51, pp. 161-166, 1994.
3. Y. Hasegawa and K. Okamura, "Synthesis of continuous silicon carbide fibre; Part 3 Pyrolysis process of polycarbosilane and structure of the products", J. Mater. Sci., 18, pp. 3633-3648, 1983.
4. Y. Hasegawa, "Ultrahigh molecular weight of polycarbosilane for SiC/SiC", Proc. of The 55th Polymer Conf., pp. 3003-3004, 2006.