Fabrication of micromechanically-modulated MgO magnetic tunnel junction sensors

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 667-670

  Jaramillo, Gerardo ^a   Chan, Mei Lin ^a   Guedes, André ^a   Horsley, David A ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

1/F NOISE; AT RESONANCE; BULK-MICROMACHINED; DC MAGNETIC FIELD; HIGH FREQUENCY; LOW FREQUENCY; MAGNETIC SIGNALS; MAGNETIC TUNNEL JUNCTION; MAGNETIC TUNNEL JUNCTION SENSORS; MAGNETORESISTIVE; MECHANICAL MOTIONS; MEMS SENSORS; MEMS-STRUCTURE; MONOLITHIC INTEGRATION; SENSING PLATFORMS; SOI-MEMS;

MAGNETIC DEVICES; MAGNETIC FIELDS; MAGNETIC THIN FILMS; MECHANICAL ENGINEERING; MECHANICS; MONOLITHIC INTEGRATED CIRCUITS; REACTIVE ION ETCHING; SENSORS;

TUNNEL JUNCTIONS;

EID: 77952776901     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442320     Document Type: Conference Paper

References (4)

1. R.C. Chaves, P.P. Freitas, B. Ocker and W. Maass, "Low frequency picotesla field detection using hybrid MgO based tunnel sensors," Appl. Phys. Lett., vol. 91, pp. 102504-102513, 2007.
2. A.S. Edelstein, G.A. Fisher, M. Pedersen, E.R. Nowak and S.F. Cheng, "Progress toward a thousandfold reduction in 1/f noise in magnetic sensors using an ac microelectromechanical system flux concentrator (invited)," J. Appl. Phys., vol. 99, 2006.
3. A. Guedes, S.B. Patil, S. Cardoso, V. Chu, J.P. Conde and P.P. Freitas, "Hybrid magnetoresistive/microelectromechanical devices for static field modulation and sensor 1/f noise cancellation.", J. Appl. Phys., vol. 103, pp. 07E924, 2008.
4. W.J. Gallagher, S.S.P. Parkin, Y. Lu, X.P. Bian, A. Marley, K.P. Roche, R.A. Altman, S.A. Rishton, C. Jahnes, T.M. Shaw and G. Xiao " Microstructured magnetic tunnel junctions" J. Appl. Phys., vol. 81, pp. 3741-3746, 1997.