Highly linear, ultra sensitive bio-mems force sensors with large force measurement range

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 88-91

  Rajagopalan, Jagannathan ^a   Tofangchi, Alireza ^a   Saif, M Taher A ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AQUEOUS ENVIRONMENT; BIOLOGICAL STUDIES; BIOMEMS; CAPILLARY FORCE; FORCE RESOLUTION; FORCE SENSOR; FORCE-DISPLACEMENT CHARACTERISTICS; FRUIT FLIES; IN-VIVO; MECHANICAL RESPONSE; MICRO-MECHANICAL;

FORCE MEASUREMENT; MECHANICAL ENGINEERING; MECHANICS; PEST CONTROL; REACTIVE ION ETCHING;

SENSORS;

EID: 77952759694     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442558     Document Type: Conference Paper

References (5)

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