Enhanced nanometer-scale infrared spectroscopy with a contact mode microcantilever having an internal resonator paddle

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 136-139

  Felts, J R ^a   Kjoller, K ^b   Prater, C B ^b   King, W P ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b Anasys Instruments   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACRYLIC ACIDS; ANALYTICAL TECHNIQUES; ATOMIC FORCE MICROSCOPE CANTILEVERS; CHEMICAL COMPOSITIONS; CHEMICAL IDENTIFICATION; CHEMICAL SPECIES; CONTACT MODES; DIFFRACTION LIMITS; IR LASERS; IR SPECTROSCOPY; IR SPECTRUM; MICRO-CANTILEVERS; NANO-METER-SCALE; ORGANIC MATERIALS; SIGNAL TO NOISE; SPATIAL RESOLUTION; THERMO-MECHANICAL;

ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; CARBOXYLIC ACIDS; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; ETHYLENE; MECHANICAL ENGINEERING; MECHANICS; ORGANIC ACIDS; PULSED LASER APPLICATIONS; REACTIVE ION ETCHING;

INFRARED SPECTROSCOPY;

EID: 77952754085     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442546     Document Type: Conference Paper

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