Tactile and shear stress sensing array using capacitive mechanisms with floating electrodes

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 228-231

  Cheng, M Y ^a   Lin, C L ^a   Yang, Y J ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE SENSING; CAPACITOR STRUCTURES; FLEXIBLE PRINTED CIRCUIT BOARDS; FLOATING ELECTRODES; MICROMACHINED; SENSING ELECTRODE; SENSING ELEMENTS; STRESS SENSING;

MECHANICAL ENGINEERING; MECHANICS; MEMS; PRINTED CIRCUIT BOARDS; PRINTED CIRCUIT MANUFACTURE; REACTIVE ION ETCHING; SHEAR STRESS; SILICONES;

ELECTRODES;

EID: 77952749531     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442525     Document Type: Conference Paper

References (7)

1. L. Wang and D. J. Beebe, "A silicon-based shear force sensor: development and characterization," Sensors and Actuators A-Physical, vol. 84, pp. 33-44, 2000.
2. B. J. Kane, M. R. Cutkosky, and G. T. A. Kovacs, "A traction stress sensor array for use in high-resolution robotic tactile imaging," Journal of Microelectromechanical Systems, vol. 9, pp. 425-434, 2000.
3. K. Kim, K. R. Lee, Y. K. Kim, D. S. Lee, N. K. Cho, W. H. Kim, K. B. Park, H. D. Park, Y. K. Park, J. H. Kim, J. J. Pak, and IEEE, "3-axes flexible tactile sensor fabricated by Si micromachining and packaging technology," IEEE MEMS conference, pp. 678-681, 2006.
4. K. Noda, K. Hoshino, K. Matsumoto, and I. Shimoyama, "A shear stress sensor for tactile sensing with the piezoresistive cantilever standing in elastic material," Sensors and Actuators A: Physical, vol. 127, pp. 295-301, 2006.
5. H. K. Lee, J. Chung, S. I. Chang, and E. Yoon, "Normal and shear force measurement using a flexible polymer tactile sensor with embedded multiple capacitors," Journal of Microelectromechanical Systems, vol. 17, pp. 934-942, 2008.
6. J. G. Rocha, C. Santos, J. M. Cabral, and S. Lanceros-Mendez, "3 axis capacitive tactile sensor and readout electronics," IEEE International Symposium on Industrial Electronics, Montreal, Canada 2006, pp. 2767-2772.
7. M.-Y. Cheng , X.-H. Huang , C.-W. Ma, and Y.-J. Yang, "A flexible capacitive tactile sensing array with floating electrodes," Journal of Micromechanics and Microengineering, vol. 19, pp. 1-10, 2009.