Optimization of no-moving part fluidic resistance microvalves with low Reynolds number

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 67-70

  Deng, Yongbo ^a,b   Liu, Zhenyu ^a   Zhang, Ping ^a   Wu, Yihui ^a   Korvink, Jan G ^c  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN CONSTRAINTS; DIODICITY; FLUIDIC CHANNELS; FLUIDIC RESISTANCES; LOW REYNOLDS NUMBER; MICRO VALVES; MOVING PARTS; NUMERICAL VALUES; OPTIMIZATION PROCEDURES; REVERSE FLOW;

MECHANICAL ENGINEERING; MECHANICS; OPTIMIZATION; PUMPS; REACTIVE ION ETCHING; REYNOLDS NUMBER;

VALVES (MECHANICAL);

EID: 77952748109     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442565     Document Type: Conference Paper

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