Simple piezoelectric-actuated mirror with 180 kHz servo bandwidth

Optics Express

Volumn 18, Issue 10, 2010, Pages 9739-9746

  Briles, Travis C ^a   Yost, Dylan C ^a   Cingöz, Arman ^a   Ye, Jun ^a   Schibli, Thomas R ^a  

^a UNIVERSITY OF COLORADO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BANDWIDTH; FREQUENCY STABILITY; MIRRORS; OPTICAL COMMUNICATION; STABILIZATION;

AMPLITUDE RESPONSE; HIGH BANDWIDTH; LASER FREQUENCY STABILIZATION; OPTICAL CAVITIES; OPTICAL INTERFEROMETER; OPTICAL LENGTH; PHASE MARGINS; PRECISION CONTROL; PZT; SERVO BANDWIDTH; SERVO LOOPS; UNITY-GAIN FREQUENCIES;

PIEZOELECTRICITY;

ARTICLE; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; MICROELECTROMECHANICAL SYSTEM; OPTICAL INSTRUMENTATION; TELECOMMUNICATION; TRANSDUCER; VIBRATION;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; LENSES; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; TELECOMMUNICATIONS; TRANSDUCERS; VIBRATION;

EID: 77952713364     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.009739     Document Type: Article

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25. All stack PZTs used here are from Physik Instrumente (http://www.physi. kinst.rum.ente.com/). Model PL033.31 was used for testing the effect of lead as presented in Fig. 2 and model PL055.31 was used to lock the Fabry-Perot cavity with a servo bandwidth of 100 kHz.
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29. THS6012EVM. evaluation board from Texas Instruments was used as a high current driver. The output impedance was changed from 50 ω to 5 ω.