Dependence of Mocrowave-Plasma Density Sustained below the Resonance on the Thickness of Dielectric Window

IEEJ Transactions on Fundamentals and Materials

Volumn 123, Issue 5, 2003, Pages 519-520

  Takahashi, Yoshihisa ^a   Kogoshi, Sumio ^a  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

electron density control; microwave; periodic change of electron density; slot antenna; surface wave plasma

Indexed keywords

EID: 77952686386     PISSN: 03854205     EISSN: 13475533     Source Type: Journal    
DOI: 10.1541/ieejfms.123.519     Document Type: Article

References (8)

1. I. Ghanashev, N. Nagatsu, and H. Sugai : “Surface Wave Eigenmodes in a Finite-Area Plane Microwave Plasma”, Jpn. J. Appl. Phys., Vol. 36, Part 1, No. 1A, p. 337 (1997).
2. Y. Urabe, K. Komiyama, and S. Kogashi : “High energy electron production in a resonant absorption”, The Papers of Technical Meeting on Plasma Science and Technology, IEE Japan, PST-02-56, p. 71 (2002) (in Japanese).
3. A. Katamoto, Y. Urabe, S. Kogoshi, and Fujisaki : “PIC-MCC simulation of surface wave plasma”, Joint Conf. ESCAMIG 16 and ICRP 5, Vol. 1, p. 253, Grenoble, France (2002-7).
4. K. Aoki, T. Yamauchi, M. Yamage, and M. Kanoh : “Relation between shepe of dielectric window and Stability of microwave excited plasma”, Ext. Abstr. (44th Spring Meet. 1997), Japan Society of Applied Physics and Related Societies, No. 1, 30a-R-8, p. 39 (in Japanese).
5. T. Morino, Q. Chen, and M. Katsurai : “Study on Influence of Window-Plate Thickness in Planar Type Surface Wave Plasma Processing Device”, 1998 National Convention Record, IEE Japan, p. 1-58 (in Japanese).
6. M. Furukawa, N. Saito, K. Kawamura, T. Koromogawa and H. Shindow : “Production of Large-Diameter Microwave Plasma with a High-Permittivity Material window”, Jpn. J. Appl. Phys., Vol. 37, p. L1005 (1998).
7. H. Ita, M. Muto, M. Yamage, and K. Yamauchi : “Large-diameter plasma generation with TEM-mode microwaves”, Ext. Abstr. (61st Autumn Meet. 2000), Japan Society of Applied Physics and Related Societies, No. 1, 4a-F-2, p. 79 (in Japanese).
8. Y. Takahashi, M. Nomura, and S. Kogoshi : “Electron density control by dielectrics in wave guide mode discharges”, The Papers of Technical Meeting on Plasma Science and Technology, IEE Japan, PST-02-3, P. 11 (2002) (in Japanese).