Fabrication of a microelectromechanical directional sound sensor with electronic readout using comb fingers

Applied Physics Letters

Volumn 96, Issue 17, 2010, Pages

  Touse, Michael ^a   Sinibaldi, Jose ^a   Simsek, Kursad ^a   Catterlin, Jeffrey ^a   Harrison, Stephen ^a   Karunasiri, Gamani ^a  

^a NAVAL POSTGRADUATE SCHOOL   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMB FINGERS; ELECTRICAL RESPONSE; ELECTRONIC READOUT; MICRO-ELECTRO-MECHANICAL; SOUND SENSORS;

SENSORS;

EID: 77952359805     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3418640     Document Type: Article

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