A closed-loop SC interface for a ±1.4g accelerometer with 0.33% nonlinearity and 2μg/√Hz input noise density

Digest of Technical Papers - IEEE International Solid-State Circuits Conference

Volumn 53, Issue , 2010, Pages 320-321

  Yucetas, Mikail ^a   Salomaa, Jarno ^a   Kalanti, Antti ^a   Aaltonen, Lasse ^a   Halonen, Kari ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

BROWNIAN NOISE; CLOSED-LOOP; CLOSED-LOOP ACCELEROMETERS; HIGH FREQUENCY HF; HIGH QUALITY FACTORS; INPUT NOISE; LOW NOISE; MEMS ACCELEROMETER; NON-LINEARITY; OPEN LOOPS; RESONANCE MODE; SIMPLE TOPOLOGY; VACUUM PACKAGING;

ATMOSPHERIC PRESSURE; LINEARIZATION; RESONANCE; TOPOLOGY;

ACCELEROMETERS;

EID: 77952160732     PISSN: 01936530     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISSCC.2010.5433899     Document Type: Conference Paper

References (5)

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2. th-order Digital Compensator", ISSCC Dig. Tech. Papers, pp. 248-249, Feb. 2005.
3. J. M. Gómez, et al., "Force-Balance Interface Circuit Based on Floating MOSFET Capacitors for Micro-Machined Capacitive Accelerometers ", IEEE Trans. Circ. Syst. II, vol. 53, no. 7, pp. 546-552, July 2006.
4. J. Wu and L. R. Carley, "Electromechanical ΔΣ Modulation with High-Q Micromechanical Accelerometers and Pulse Density Modulated Force Feedback", IEEE Trans. Circ. Syst. I, vol. 53, no. 2, pp. 274-287, Feb. 2006.
5. L. Aaltonen and K. Halonen, "Continuous-time interface for a micromachined capacitive accelerometer with NEA of 4 μg and bandwidth of 300 Hz" Sens. Act. A, vol. 154, issue 1, pp. 46-56, Aug. 2009.