Fabrication of dielectric and metallo-dielectric 3D nanostructures by direct laser writing and electroless plating

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7585, Issue , 2010, Pages

  Radke, André ^a,b   Wolff, Frank ^a   Giessen, Harald ^b   Klotzbücher, Thomas ^a  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

^b UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Direct laser writing; Electroless plating; SU 8; Two photon polymerization; Woodpile photonic crystal

Indexed keywords

3D GEOMETRY; DIELECTRIC STRUCTURE; DIRECT LASER WRITING; GRATING PERIODS; HIGH-RESOLUTION MICROSCOPES; LASER FOCUS; METAL FILM; METALLODIELECTRIC; NEAR-INFRARED WAVELENGTH; SENSITIVE MATERIALS; SILVER FILM; SPECTRAL POSITION; SU-8; SUBMICRON RESOLUTION; TWO PHOTON POLYMERIZATION; TWO-PHOTON ABSORPTIONS; ULTRASHORT LASER PULSE;

CONDUCTIVE FILMS; ELECTROLESS PLATING; FABRICATION; METALLIC FILMS; MULTIPHOTON PROCESSES; PHOTONS; POLYMERIZATION; PULSED LASER APPLICATIONS; SILVER; THREE DIMENSIONAL;

PHOTONIC CRYSTALS;

EID: 77951746988     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.845474     Document Type: Conference Paper

References (7)

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