Lasers in the manufacturing of LEDs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7584, Issue , 2010, Pages

  Mendes, Marco ^a   Fu, Jie ^a   Porneala, Christian ^a   Song, Xiangyang ^a   Hannon, Mat ^a   Sercel, Jeff ^a  

^a J P Sercel Associates Inc   (United States)

Author keywords

DPSS; Excimer; GaN; Laser; LEDs; Lift off; Scribing

Indexed keywords

ALN; DIODE PUMPED SOLID STATE LASER; DPSS; EXCIMER; EXCIMERS; HIGH QUALITY; HIGH THROUGHPUT; HOMOGENEOUS ILLUMINATION; II-IV SEMICONDUCTORS; III-NITRIDES; LASER LIFT-OFF; LASER PARAMETERS; LASER SCRIBING; LED INDUSTRY; MANUFACTURING COST; SAPPHIRE SUBSTRATES; VERTICAL-TYPE;

ALUMINUM ARSENIDE; ALUMINUM GALLIUM ARSENIDE; ALUMINUM GALLIUM NITRIDE; ALUMINUM NITRIDE; COST REDUCTION; EXCIMER LASERS; FILM GROWTH; GALLIUM ALLOYS; GALLIUM ARSENIDE; GALLIUM NITRIDE; GALLIUM PHOSPHIDE; GAS LASERS; LASER APPLICATIONS; LIGHT EMITTING DIODES; MANUFACTURE; MICROELECTRONICS; PUMPING (LASER); SAPPHIRE; SEMICONDUCTOR GROWTH; SILICON CARBIDE; SOLID STATE LASERS; SPREADSHEETS;

SEMICONDUCTOR LASERS;

EID: 77951567035     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.843815     Document Type: Conference Paper

References (0)