Equipment models for fab level proudction simulation: Practical features and computational tractability

Proceedings - Winter Simulation Conference

Volumn , Issue , 2009, Pages 1581-1591

  Morrison, James R ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL REQUIREMENTS; COMPUTATIONAL TRACTABILITY; CYCLE TIME; EQUIPMENT MODELS; LOT SIZE; MODEL PREDICTION; ON-WAFER; ORDER OF MAGNITUDE; PROCESS TIME; PRODUCT DIVERSITY; WAFER TRANSPORT;

PHOTOLITHOGRAPHY;

THROUGHPUT;

EID: 77951543326     PISSN: 08917736     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WSC.2009.5429265     Document Type: Conference Paper

References (11)

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