Development of electrostatic levitation motor for vacuum condition

IEEE International Symposium on Industrial Electronics

Volumn II, Issue , 2003, Pages 934-939

  Yamamoto, A ^a   Yasui, H ^a   Shimizu, N ^a   Higuchi, T ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Acceleration; Electromagnetic fields; Electromagnetic heating; Electrostatic levitation; Force control; Friction; Lithography; Open loop systems; Stators; Synchronous motors

Indexed keywords

ACCELERATION; DIELECTRIC LIQUIDS; ELECTRIC DRIVES; ELECTROMAGNETIC FIELDS; ELECTRON BEAM LITHOGRAPHY; ELECTROSTATICS; FORCE CONTROL; FRICTION; HEAT GENERATION; INDUSTRIAL ELECTRONICS; LITHOGRAPHY; STATORS; SYNCHRONOUS MOTORS; TRIBOLOGY; VACUUM APPLICATIONS;

ELECTRO-MAGNETIC MOTORS; ELECTROMAGNETIC HEATING; ELECTROSTATIC DRIVE; ELECTROSTATIC LEVITATION; ELECTROSTATIC LINEAR MOTORS; ELECTROSTATIC MOTOR; LINEAR SYNCHRONOUS MOTORS; OPEN LOOP SYSTEMS;

LINEAR MOTORS;

EID: 77951531917     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISIE.2003.1267947     Document Type: Conference Paper

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