Directed integration of ZnO nanobridge sensors using photolithographically patterned carbonized photoresist

Nanotechnology

Volumn 21, Issue 19, 2010, Pages

  Huang, Chien Chih ^a   Pelatt, Brian D ^a   Conley Jr , John F ^a  

^a Oregon State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOTTOM GATE; DEVICE STRUCTURES; DIRECTED GROWTH; ELECTRICAL CONNECTION; ELECTRICAL MEASUREMENT; FIELD-EFFECT DEVICES; GAS SENSORS; METAL CATALYST; NANOBRIDGE; OXYGEN CONCENTRATIONS; PICK AND PLACE; SEED LAYER; ULTRA-VIOLET LIGHT; UV LIGHT; VAPOR TRANSPORT; ZNO;

CATALYSTS; ELECTRIC CONNECTORS; OXYGEN; SENSORS; ULTRAVIOLET RADIATION; ZINC OXIDE;

PHOTORESISTS;

EID: 77951462324     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/19/195307     Document Type: Article

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