A new formulation of laser step diagonal measurement-Three-dimensional case

Precision Engineering

Volumn 34, Issue 3, 2010, Pages 516-525

  Ibaraki, Soichi ^a   Hata, Takafumi ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Laser interferometer; Machine tools; Measurement; Step diagonal measurement; Volumetric accuracy

Indexed keywords

APPLICATION EXAMPLES; DIAGONAL MEASUREMENT; DIAGONAL TEST; DISPLACEMENT MEASUREMENTS; ESTIMATION ERRORS; HIGH-PRECISION; IDENTIFICATION SCHEME; LASER INTERFEROMETER; LINEAR DISPLACEMENTS; LINEAR LASERS; MOTION ACCURACY; SETUP ERRORS; SINGLE-AXIS; STRAIGHTNESS ERRORS; VERTICAL MACHINING; VOLUMETRIC ERRORS;

INTERFEROMETERS; LASER INTERFEROMETRY; MACHINE TOOLS; MEASUREMENT ERRORS; MIRRORS; THREE DIMENSIONAL; VOLUMETRIC ANALYSIS;

MEASUREMENTS;

EID: 77951298541     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2010.02.004     Document Type: Article

References (12)

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