Improvement of sputtered Galfenol thin films for sensor applications

Smart Materials and Structures

Volumn 19, Issue 5, 2010, Pages

  Adolphi, B ^a   McCord, J ^b   Bertram, M ^a   Oertel, C G ^a   Merkel, U ^a   Marschner, U ^a   Schafer R ^b   Wenzel, C ^a   Fischer, W J ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^b IFW DRESDEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING DEFORMATIONS; COMPOUND STRUCTURES; FIBER TEXTURE; GALFENOL; LAYER MORPHOLOGY; MAGNETO-ELASTIC; MAGNETOELASTIC FILMS; MAGNETOELASTIC SENSOR; RELATIVE PERMEABILITY; SEED LAYER; SENSOR APPLICATIONS; SI WAFER; TEXTURE COMPONENTS;

DEFORMATION; SENSORS; SILICON; SILICON WAFERS; TEXTURES;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 77951238023     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/19/5/055013     Document Type: Article

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