ZnO nanowires grown on SOI CMOS substrate for ethanol sensing

Sensors and Actuators, B: Chemical

Volumn 146, Issue 2, 2010, Pages 559-565

  Santra, S ^a   Guha, P K ^b   Ali, S Z ^a   Hiralal, P ^a   Unalan, H E ^c   Covington, J A ^b   Amaratunga, G A J ^a   Milne, W I ^a   Gardner, J W ^b   Udrea, F ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF WARWICK   (United Kingdom)

^c MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

Ethanol sensor; Gas sensor; SOI CMOS; Zinc oxide nanowires

Indexed keywords

ALCOHOL SENSOR; BONDED ALUMINUM; CHEMICAL SENSITIVITY; ETHANOL SENSING; ETHANOL SENSORS; ETHANOL VAPOURS; GAS SENSORS; GOLD BUMPS; HUMIDITY LEVELS; HYDROTHERMAL METHODS; INTEGRATED CIRCUITRY; LOW COSTS; LOW-POWER CONSUMPTION; MICRO HOTPLATE; MICROHEATER; MICROHOTPLATES; ON CHIPS; POWER CONSUMPTION; PROMISING MATERIALS; SEM; SENSING MATERIAL; SILICON SUBSTRATES; SILICON-ON-INSULATOR CMOS; SOI CMOS; XRD; ZINC OXIDE NANOWIRES; ZNO NANOWIRES; ZNO NWS;

CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; ETHANOL; GAS DETECTORS; METALLIC COMPOUNDS; MOS DEVICES; NANOWIRES; OHMIC CONTACTS; SEMICONDUCTING SILICON; SILICON NITRIDE; SILICON OXIDES; X RAY DIFFRACTION; ZINC;

ZINC OXIDE;

EID: 77951116869     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2010.01.009     Document Type: Article

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