Removal behaviors of different SiC ceramics during polishing

Journal of Materials Science and Technology

Volumn 26, Issue 2, 2010, Pages 125-130

  Liu, Guiling ^a   Huang, Zhengren ^a   Liu, Xuejian ^a   Jiang, Dongliang ^a  

^a SHANGHAI INSTITUTE OF CERAMICS   (China)

Author keywords

Polishing; Removal behavior; SiC; Surface quality

Indexed keywords

ABRASIVES; CERAMIC MATERIALS; SILICON CARBIDE; SURFACE PROPERTIES; SURFACE ROUGHNESS;

ABRASIVE GRAINS; CERAMIC MICROSTRUCTURES; COMPARATIVE EXPERIMENTS; REMOVAL MECHANISM; SECOND PHASE; SIC CERAMICS; SIC MATRIXES; SILICON CARBIDES (SIC);

POLISHING;

EID: 77950918984     PISSN: 10050302     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1005-0302(10)60020-5     Document Type: Article

References (21)

1. N. Ebizuka, Y. Dai, H. Eto, W. Lin, T. Ebisuzaki, H. Omori, T. Handa, H. Takami and Y. Takahashi: Proc. SPIE, 2003, 4842, 329.
2. A. Khounsary, P. Fernandez, L. Assoufid, D. Mills, D. Walters, J. Schwartz and J. Robichaud: Rev. Sci. Instrum., 2002, 73, 1537.
3. Y.M. Zhang, J.H. Zhang, J.C. Han, X.D. He and W. Yao: Mater. Lett., 2004, 58, 1204.
4. Q.D. Wu, Y.G. Yan, B.J. Quo, M.J. Li and X.P. Liu: J. Inorg. Mater., 2004, 19, 302. (in Chinese)
5. Y.X. Wang, S.H. Tan and D.L. Jiang: J. Inorg. Mater., 2004, 19, 456. (in Chinese)
6. E. Volz, A. Roosen, W. Hartung and A. Winnacker: J. Eur. Ceram. Soc., 2001, 21, 2089.
7. N. Zhang, H.Q. Ru, Q.K. Cai and X.D. Sun: Mater. Sci. Eng. A, 2008, 486, 262.
8. S.H. Tan, Z.M. Chen and D.L. Jiang: J. Chin. Ceram. Soc., 1998, 26, 191. (in Chinese)
9. Z.H. Zhou, S.H. Tan, D.L. Jiang and Y. Yi: Surf. Rev. Lett., 2005, 5-6, 799.
10. G.L. Liu, Z.R. Huang, X.J. Liu and D.L. Jiang: J. Inorg. Mater., 2007, 22, 769. (in Chinese)
11. T.G. Bifano, Y. Yi and W.K. Kahl: Precis. Eng., 1994, 2, 109.
12. Y.C. Lin and C.H. Kao: Int. J. Adv. Manuf. Technol., 2005, 25, 40.
13. J.S. Johnson, K.D. Grobsky and D. Bray: Proc. SPIE, 2002, 4771, 243.
14. M. Murahara: Proc. SPIE, 2002, 4679, 69.
15. X.F. Chen, X.G. Xu, J. Li, S.Z. Jiang, L. Ning, Y.M. Wang, D.Y. Ma, X.B. Hu and M.H. Jiang: J. Mater. Sci. Technol., 2007, 23(3), 430.
16. H.H.K. Xu, N.P. Padture and S. Jahanmir: J. Am. Ceram. Soc., 1995, 78, 2443.
17. N.P. Padture, C.J. Evans, H.H.K. Xu and B.R. Lawn: J. Am. Ceram. Soc., 1995, 78, 215.
18. Y. Xie and B. Bhushan: Wear, 1996, 200, 281.
19. B.R. Lawn, N.P. Padture, H.Cai and F. Guiberteau: Science, 1994, 263, 1114.
20. T.G. Bifano, T.A. Dow and R.O. Scattergood: J. Eng. Ind., 1991, 113, 184.
21. V.C. Venkatesh, S. Izman, S. Sharif, T.T. Mon and M. Konneh: Sadhana-Acad. Proc. Eng. Sci., 2003, 28, 915.