Characterization of ZnO thin film synthesized on alumina-rich spinel substrate by magnetron sputtering

Applied Surface Science

Volumn 256, Issue 16, 2010, Pages 4934-4937

  Tang, Huili ^a,b   Xu, Jun ^a   Li, Hongjun ^a   Dong, Yongjun ^c   Wang, Yinzhen ^d   Wu, Feng ^c  

^a SHANGHAI INSTITUTE OF CERAMICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^d SOUTH CHINA NORMAL UNIVERSITY   (China)

Author keywords

Magnetron sputtering; Semiconductor compounds; ZnO thin film

Indexed keywords

ALUMINA; ALUMINUM OXIDE; ENERGY GAP; II-VI SEMICONDUCTORS; LIGHT ABSORPTION; MAGNESIUM COMPOUNDS; MAGNETIC SEMICONDUCTORS; MAGNETRON SPUTTERING; METALLIC FILMS; SEMICONDUCTING ZINC COMPOUNDS; SUBSTRATES; THIN FILMS; WIDE BAND GAP SEMICONDUCTORS; ZINC OXIDE;

ALUMINA-RICH SPINELS; EXCITON ABSORPTIONS; LONGITUDINAL OPTICAL PHONONS; NEAR BAND EDGE EMISSIONS; RESONANT RAMAN SCATTERING; RF-MAGNETRON SPUTTERING; SEMICONDUCTOR COMPOUNDS; ZNO THIN FILM;

OPTICAL FILMS;

EID: 77950915872     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.03.005     Document Type: Article

References (15)

1. Service R.F. Science 276 (1997) 895
2. Bagnall D.M., Chen Y.F., Zhu Z., Yao T., Koyama S., Shen M.Y., and Goto T. Appl. Phys. Lett. 70 (1997) 2230-2232
3. Liu Y., Gorla C.R., Liang S., et al. J. Electron. Mater. 29 (2000) 60
4. Zhang Y.S., Yu K., Ouyang S.X., and Zhu Z.Q. Phys. B 382 (2006) 76
5. Jeong W.J., Kim S.K., and Park G.C. Thin Solid Films 506-507 (2006) 180-183
6. Mitchell T.E. J. Am. Ceram. Soc. 82 (1999) 3305-3316
7. M.R. Kokta, H.T. Ong, US Patent Application No. US 2003/0188678 A1 (2003).
8. Tang H.L., Xu J., Dong Y.J., and Wu F. J. Alloys Compd. 470 (2009) L29-L32
9. Lim W.T., and Lee C.H. Thin Solid Films 353 (1999) 12-15
10. Zu P., Tang Z.K., Wong G.K.L., Kawasaki M., Ohtomo A., Koinuma H., and Segawa Y. Solid State Commun. 103 (1997) 459-463
11. Calleja J.M., and Cardona M. Phys. Rev. B 16 (1977) 3753-3761
12. Suárez R.R., and Proupin E.M. Phys. Rev. B 62 (2000) 11006-11016
13. Ashkenov N., Mbenkum B.N., Bundesmann C., Riede V., Lorenz M., Spemann D., Kaidashev E.M., Kasic A., Schubert M., and Grundmann M. J. Appl. Phys. 93 (2003) 126-133
14. Mohanta S.K., Kim D.C., Cho H.K., Chua S.J., and Tripathy S. J. Cryst. Growth 310 (2008) 3208-3213
15. Sans J.A., Segura A., Mollar M., and Marí B. Thin Solid Films 453/454 (2004) 251-255