Deterministic flow lines with applications

IEEE Transactions on Automation Science and Engineering

Volumn 7, Issue 2, 2010, Pages 228-239

  Morrison, James R ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Discrete event simulation; Flow line; Photolithography cluster tools; Semiconductor manufacturing automation

Indexed keywords

ARRIVAL PROCESS; CLUSTER TOOL; RECURSIONS; SEMICONDUCTOR MANUFACTURING; SERVICE TIME;

INDUSTRIAL APPLICATIONS; PHOTOLITHOGRAPHY; TOOLS;

FLOW SIMULATION;

EID: 77950865587     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2009.2027222     Document Type: Article

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