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Volumn 81, Issue 3, 2010, Pages

Note: Influence of rinsing and drying routines on growth of multilayer thin films using automated deposition system

Author keywords

[No Author keywords available]

Indexed keywords

CHARGED SPECIES; DEPOSITED LAYER; DEPOSITION SYSTEMS; ELECTROSTATIC INTERACTIONS; HIGH-SPEED ROBOTS; IN-BETWEEN; LAYER BY LAYER DEPOSITION; MULTI-LAYER THIN FILM; MULTIFUNCTIONAL THIN-FILMS; NANO LAYERS; NATURAL MONTMORILLONITE; OXYGEN TRANSMISSION RATES; POLYETHYLENIMINES; PROCESSING TIME; WASTE REMOVAL;

EID: 77950564612     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3310088     Document Type: Article
Times cited : (47)

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