Chemical analysis of nickel silicides with high spatial resolution by combined EDS, EELS and ELNES

Journal of Physics: Conference Series

Volumn 209, Issue , 2010, Pages

  Verleysen, E ^a,b   Bender, H ^a   Schryvers, D ^c   Vandervorst, W ^a,b  

^a IMEC   (Belgium)

^b KU LEUVEN   (Belgium)

^c UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ANALYSIS; ELECTRON ENERGY LEVELS; ELECTRON SCATTERING; ENERGY DISPERSIVE SPECTROSCOPY; ENERGY DISSIPATION; IMAGE RESOLUTION; NICKEL; NICKEL COMPOUNDS; SILICIDES; X RAY SPECTROSCOPY;

ABSORPTION CORRECTIONS; ACCURACY AND PRECISION; BRANCHING RATIO; ENERGY DISPERSIVE X RAY SPECTROSCOPY; HIGH SPATIAL RESOLUTION; MODEL BASED APPROACH; NEAR EDGE STRUCTURE; SPATIAL RESOLUTION;

ELECTRON ENERGY LOSS SPECTROSCOPY;

EID: 77950480413     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/209/1/012057     Document Type: Conference Paper

References (4)

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3. Verbeeck J and Van Aert S 2004 Ultramicroscopy 101 207
4. Pearson DH, Ahn C and Fultz B 1993 Phys. Rev. B 47 8471