The effect of various coil parameters on ICP torch simulation

Journal of Physics: Conference Series

Volumn 208, Issue , 2010, Pages

  Punjabi, Sangeeta B ^a   Das, T K ^b   Joshi, N K ^b   Mangalvedekar, H A ^a   Lande, B K ^a   Das, A K ^b  

^a VEERMATA JIJABAI TECHNOLOGICAL INSTITUTE   (India)

^b BHABHA ATOMIC RESEARCH CENTRE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; ELECTRIC DISCHARGES; ENERGY DISSIPATION; FLOW FIELDS; FLOW PATTERNS; GEOMETRY; INDUCTIVELY COUPLED PLASMA; LAMINAR FLOW;

COIL CONFIGURATIONS; ENERGY DISSIPATION RATE; INDUCTIVELY COUPLED PLASMA (ICP); NON-UNIFORM SPACING; OSCILLATOR FREQUENCY; PROCESS APPLICATIONS; VECTOR POTENTIAL; WALL TEMPERATURES;

COMPUTATIONAL FLUID DYNAMICS;

EID: 77950470412     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/208/1/012048     Document Type: Conference Paper

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