Development of a MEMS digital accelerometer (MDA) using a microscale liquid metal droplet in a microstructured photosensitive glass channel

Sensors and Actuators, A: Physical

Volumn 159, Issue 1, 2010, Pages 51-57

  Park, Usung ^a   Yoo, Kwanghyun ^b   Kim, Joonwon ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

Accelerometer; Contact angle hysteresis; Liquid metal droplet; Non wetting; Photosensitive glass

Indexed keywords

CONTACT ANGLE HYSTERESIS; ELECTRICAL CONDUCTIVITY; ETCHING PROCESS; EXPERIMENTAL VALIDATIONS; GLASS CHANNELS; GLASS SURFACES; HIGH DENSITY; LIQUID METAL DROPLETS; MICRO-SCALES; MICROELECTROMECHANICAL SYSTEMS; MICROSCALE LIQUID; NON-WETTING; OPERATIONAL CONCEPTS; PHOTO-ETCHING;

ACCELEROMETERS; COMPOSITE MICROMECHANICS; CONTACT ANGLE; DROP FORMATION; ELECTRIC CONDUCTIVITY; ETCHING; HYSTERESIS; LIGHT SENSITIVE MATERIALS; LIQUID METALS; MECHANICAL STABILITY; MEMS; METALS; MICROELECTROMECHANICAL DEVICES; PHOTOSENSITIVITY; SOFTWARE ARCHITECTURE; SURFACE TENSION; WETTING;

PHOTOSENSITIVE GLASS;

EID: 77950311963     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.02.011     Document Type: Article

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