Capacitive micro pressure sensor integrated with a ring oscillator circuit on chip

Sensors

Volumn 9, Issue 12, 2009, Pages 10158-10170

  Dai, Ching Liang ^a   Lu, Po Wei ^a   Chang, Chienliu ^b   Liu, Cheng Yang ^c  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b CANON INC   (Japan)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Cmos mems; Micro pressure sensors; Ring oscillators

Indexed keywords

CAPACITIVE PRESSURE SENSORS; CMOS (COMPLEMENTARY METAL OXIDE SEMICONDUCTOR); CMOS-MEMS; HIGH SENSITIVITY; MICRO PRESSURE SENSORS; PRESSURE RANGES; RING OSCILLATOR; SACRIFICIAL LAYER;

CMOS INTEGRATED CIRCUITS; MICROSENSORS; PRESSURE SENSORS;

OSCILLATORS (ELECTRONIC);

EID: 77950219243     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s91210158     Document Type: Article

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