Surface acoustic wave devices and their sensing capabilities

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 2009, Pages 27-36

  Avramescu, V ^a   Bostan, C ^a   Serban, B ^a   Georgescu, I ^a   Costea, S ^a   Varachiu, N ^a   Cobianu, C ^a  

^a Honeywell Romania Srl   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

GAS DETECTION; PASSIVE WIRELESS SENSORS; SENSING MECHANISM; SURFACE ACOUSTIC WAVE DEVICE; TECHNOLOGICAL CHALLENGES;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; SENSORS;

TELECOMMUNICATION EQUIPMENT;

EID: 77950166235     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMICND.2009.5336615     Document Type: Conference Paper

References (34)

1. R.M. White and F.W. Voltmer, "Direct Piezoelectric Coupling To Surface Elastic Waves", Appl. Phys. Lett. 7, 314, 1965.
2. G. Sauerbrey, Zeitschrift für Physik, 155, 1959, pp. 206-222.
3. M. Hoummady, A. Campitelli, W. Wlodarski, "Acoustic Wave sensors: Design, Sensing Mechanism and Applications", Smart Mater. Struct. 6, 1997, pp. 667-657.
4. R.M. White, "Acoustic Sensors for Physical, Chemical and BiochemicalApplications", 1998 IEEE International Frequency Control Symposium.
5. I.V. Anisimkin et al. "Surface Acoustic Wave Sensors: New Analytical Capabilities", Vestnik Moskovskogo Universiteta. Khimiya 2000, Vol.41, No.6. Supliment.
6. J.S. Danel and G. Delapierre, "Quartz: A Material for Microdevices", J. Micromech. Microeng. 1, 1991, pp. 187-198.
7. R. Ward, "The Constants Of Alpha Quartz", 14th Piezoelectric Devices Conference and Exhibition, Sept. 15-17, 1992.
8. Lord Rayleigh, "On waves propagating along the plane surface of an elastic solid," Lond. Math. Soc. Proc., 17, 1885, pp. 4-11.
9. http://www.citizen.co.jp/english/crystal/aspect/index.html
10. S. Ballandras, M. Solal, E. Briot, US pat. No. 6,316,861.
11. V. Plessky and J. Koskela "Coupling-of-modes analysis of SAW devices", Int. J. of High Speed Electronics and Systems, vol. 10, 2000, pp. 867-947.
12. G. Endoh, K. Hashimoto and M. Yamaguchi, "Surface acoustic wave propagation characterization by finite-element method and spectral domain analysis", Jpn. J. Appl. Phys., Vol. 34, 1995, pp. 2638-2641.
13. T.-T. Wu, S.-M. Wang, Y.-Y. Chen, T.-Y. Wu, P.-Z. Chang, L.-S. Huang, C.-L. Wang, C.-W. Wu and C.-K. Lee, "Inverse determination of coupling of modes parameters of surface acoustic wave resonators", Jpn. J. Appl. Phys. Vol. 41, 2002, pp. 6610-6615.
14. D.S. Ballantine, R.M. White, J. Martin, A.J. Ricco, E. T. Zellers, G. C. Frye, H. Wohltjen, "Acoustic Wave Sensors: Theory, Design, and Physico-Chemical Applications", Academic press, 1997.
15. J.D.N. Cheeke, "Fundamentals and applications of Ultrasonic Waves", CRC Press, 2002
16. A. Leidl et al. "Surface Acoustic Wave Devices and Applications in Liquid sensing", Smart Matter. Struct. 6 1997, pp. 680-688.
17. G. McHale, M.I. Newton, M.K. Banerjee, J.A. Cowen, "Acoustic Wave-Liquid interactions", Materials Science and engineering C 12, 2000, pp. 17-120.
18. A.J. Ricco, and S.J Martin, "Acoustic Wave Viscosity Sensor", Appl. Phys. Lett. 50, 21, 1987, p. 1474.
19. B. Jakoby, M. Vellekoop, "Properties of Love Waves: Applications in Sensors", Smart. Mater. Struct. 6, 1997 pp. 668-679.
20. F. Hermann, D. Hahn, S. Buttgenbach, "Separation of Density and Viscosity Influence on Liquid-loaded Surface Acoustic Wave Devices", Applied Physics Letters, Vol. 74, No. 22, 1999, p. 3410.
21. L.M. Reindl, "Theory of Wireless SAW Sensor Systems", International Symposium on Theoretical Electrical Engineering, ISTET'01, Linz, Austria, Aug. 19-23, 2001.
22. W. Buff, M. Rusko, M. Goroll, J. Ehrenpfordt, T. Vandahl, "Universal Pressure and Temperature SAW Sensor for Wireless Applications", 1997 IEEE Ultrasonic Symposium, p. 359.
23. O.K. Varghese, D. Gong, W.L. Dreschel, , K.G Ong, C.A Grimes, " Ammonia detection using nanoporous alumina resistive and surface acoustic wave sensors", Sensors and actuators, B: chemical, Vol. 94, pp. 27-35.
24. C-Y Shen, S-Y Liou, "Surface acoustic wave gas monitors for ppm ammonia detection", Sensors and Actuators , 2008, Vol. 131, pp. 673-679.
25. S.Qin, Z.Wu, Z.Tang, Y.Song, F.Zeng, D.Zhao, " The sensitivity to SO2 of the Saw gas sensor with triethanolamine modified with boric acid", Sensors and Actuators, Vol. 66, 2000, pp. 240-242.
26. B. Serban, C. Cobianu , M. Bercu, N. Varachiu, M. Mihaila,C. Bostan , S. Voicu , Matrix nanocomposite containing aminocarbon nanotubes for carbon dioxide sensor detection.« ", U.S patent application, Pub.No.: US 2008/0264147 A1, Pub. Date: Oct. 30, 2008.
27. 2 sensing with polymer-amino carbon nanotube composites", Proceedings of the International Semiconductor Conference CAS 2008, pp. 73-76.
28. B. Serban, Sarinkumar Koylothu, S. Costea, C. Cobianu, Composition for Material Sensing and Related Method and Apparatus, 8 februarie 2008, U.S A patent pending application.
29. K. Korsah, C.L. Ma, B. Dress, "Harmonic frequency analysis of SAW resonator chemical sensors: application to the detection of carbon dioxide and humidity", Sensors and actuators B 50 (1998) 110-116.
30. B. Serban, S. Voicu, S. Costea, C. Cobianu, "A Matrix nanocomposite sensing film for SAW/BAW based hydrogen sulphide sensor and method for making some", U.S. Application Serial No. 12/116, 724, Filing Date: 05/05/2008.
31. V. Avramescu et al. "Vacuum sealed surface acoustic wave pressure sensor", US Pat.7198981B2.
32. C. Cobianu et al. "Method for quartz SAW pressure and temperature sensor fabrication" US patent pending application.
33. C. Cobianu et al. "Multifunctional multichip system for wireless sensing" US Pat. 7391325B2.
34. C. Cobianu et al. "Mechanical packaging of surface acoustic wave device for sensing applications" US Patent application 20080265711A1.