Electret based capacitive MEMS vibration-to-electric energy harvesting

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 2009, Pages 219-222

  Mialtu, Razvan ^a   Sararoiu, Mihai ^a  

^a Infineon Technologies Romania   (Romania)

Author keywords

Electret based MEMS variable capacitor; Electrostatic cycles; Energy harvesting; Vibration to electricity conversion

Indexed keywords

ELECTRIC ENERGIES; ELECTRICAL POWER SUPPLY; MATLAB SIMULATIONS; MEMS TECHNOLOGY; MEMS VARIABLE CAPACITORS; MEMS-STRUCTURE; NEW CONCEPT; SELF-POWERED SYSTEMS; VIBRATION-TO-ELECTRICITY CONVERSION; VLSI DESIGN;

CAPACITANCE; CAPACITORS; ELECTRETS; ELECTRIC POWER SYSTEMS; ELECTROSTATICS; HARVESTING; MATLAB; MEMS; MICROELECTROMECHANICAL DEVICES; WIRELESS SENSOR NETWORKS;

ENERGY HARVESTING;

EID: 77950165785     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMICND.2009.5336564     Document Type: Conference Paper

References (5)

1. R. Amirtharajah and A.P. Chandrakasan, "Self-Powered Signal Processing Using Vibration-Based Power Generation," IEEE Journal of Solid-State Circuits, Vol. 33, No. 5, May 1998, pp. 687-695.
2. B.C. Yen and J H. Lang, "A Variable-Capacitance Vibration-to- Electric Energy Harvester," IEEE Transactions on Circuits and Systems, 2005.
3. F. Peano and T. Tambosso, "Design and Optimization of a MEMS Electret-Based Capacitive Energy Scavenger," IEEE Journal of Microelectromechanical Systems, Vol. 14, No. 3, June 2005, pp. 429-435.
4. S. Roundy, P.K. Wright and K. S. J. Pister, "Micro-Electrostatic Vibration-to-Electricity Converters," IEEE Proceedings of IMECE2002, 2002.
5. S. Meninger, J. O. Mur-Miranda, R. Amirtharajah, A. P. Chandrakasan and J. H. Lang, "Vibration-to-Electric Energy Conversion," IEEE Transactions on VLSI Systems, Vol. 9, No. 1, February 2001.