A cryogenic broadband DC contact RF MEMS switch

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2009, Pages 1225-1228

  Gong, Songbin ^a   Shen, Hui ^a   Scott Barker, N ^a  

^a UNIVERSITY OF VIRGINIA   (United States)

Author keywords

Contact resistance; Cryogenic temperature; DC contact; Dielectric free; RF MEMS

Indexed keywords

ACTUATION VOLTAGES; CRYOGENIC TEMPERATURES; DC CONTACT; DIELECTRIC FREE; RF MICROELECTROMECHANICAL SYSTEMS SWITCHES; RF-MEMS; RF-MEMS SWITCHES; ROOM TEMPERATURE;

COMPOSITE MICROMECHANICS; CONTACT RESISTANCE; CRYOGENICS; INSULATING MATERIALS; MEMS; MICROWAVES;

MICROELECTROMECHANICAL DEVICES;

EID: 77949968108     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2009.5165924     Document Type: Conference Paper

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