Characterization of PdO films for water vapour sensing

2009 6th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2009

Volumn , Issue , 2009, Pages

  Garcia Serrano O ^a   Pena Sierra R ^a   Romero Paredes R, G ^a   Perez Bautista C ^a  

^a DEPARTAMENTO DE FÍSICA   (Mexico)

Author keywords

Electroless; PdO films; Resistive PdO sensor

Indexed keywords

AIR ATMOSPHERE; CONTINUOUS FLOWS; DRY ATMOSPHERES; ELECTRICAL CONDUCTION; ELECTROLESS; ELECTROLESS PROCESS; ENVIRONMENTAL CONDITIONS; HUMIDITY CONDITIONS; MICROELECTRONIC TECHNOLOGIES; MOISTURE CONDITIONS; NANOMETRICS; OPERATING PARAMETERS; PD FILM; PDO FILMS; RECOVERY TIME; RESPONSE CHARACTERISTIC; RESPONSE TIME; SILICON SUBSTRATES; TEST CHAMBERS; THERMAL OXIDATION; WATER VAPOUR;

AUTOMATION; CONTROL; ELECTRICAL ENGINEERING; MICROELECTRONICS; MOISTURE; PALLADIUM; PROCESS CONTROL; SENSORS; WATER VAPOR;

HUMIDITY CONTROL;

EID: 77949810274     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICEEE.2009.5393450     Document Type: Conference Paper

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