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Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 5, Issue 5, 2008, Pages 1105-1108

Control of the concentration of protons intercalated into tungsten oxide thin films during deposition

(7) Yamada, Y a Tajima, K a Okada, M a Bao, S a Tazawa, M a Yoshimura, K a Roos, A b

a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

b UPPSALA UNIVERSITY (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

AS-DEPOSITED FILMS; CONCENTRATION OF; DIRECT-CURRENT MAGNETRON SPUTTERING; EXPERIMENTAL SPECTRA; EXTINCTION COEFFICIENTS; HYDROGEN FLOW; LINEAR DEPENDENCE; TUNGSTEN BRONZES; TUNGSTEN OXIDE THIN FILMS;

ARGON; BRONZE; DEPOSITION; OXIDES; OXYGEN; PROTONS; SPECTROSCOPIC ELLIPSOMETRY; SURFACE ROUGHNESS; THIN FILMS; TUNGSTEN; TUNGSTEN COMPOUNDS;

OXIDE FILMS;

EID: 77949657084 PISSN: 18626351 EISSN: 16101642 Source Type: Journal
DOI: 10.1002/pssc.200777734 Document Type: Conference Paper

Times cited : (10)

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