-
1
-
-
0023453803
-
A simple method for studying run-length distributions of exponentially weighted moving average charts
-
Crowder, S.V., (1987) A simple method for studying run-length distributions of exponentially weighted moving average charts. Technometrics, 29, 401–407.
-
(1987)
Technometrics
, vol.29
, pp. 401-407
-
-
Crowder, S.V.1
-
2
-
-
0000669122
-
The exponentialy weighted moving average
-
Hunter, J.S., (1986) The exponentialy weighted moving average. Journal of Quality Technology, 18, 203–210.
-
(1986)
Journal of Quality Technology
, vol.18
, pp. 203-210
-
-
Hunter, J.S.1
-
3
-
-
84946637626
-
Control chart tests bases on geometric moving averages
-
Roberts, S.W., (1959) Control chart tests bases on geometric moving averages. Technometrics, 1, 239–250.
-
(1959)
Technometrics
, vol.1
, pp. 239-250
-
-
Roberts, S.W.1
-
4
-
-
0002469321
-
Average run lengths of geometric moving average charts by numerical methods
-
Robinson, P.B., and Ho, T.Y., (1978) Average run lengths of geometric moving average charts by numerical methods. Technometrics, 20 (1), 85–93.
-
(1978)
Technometrics
, vol.20
, Issue.1
, pp. 85-93
-
-
Robinson, P.B.1
Ho, T.Y.2
-
5
-
-
0000638802
-
-
Bulletin of the International Statistical Institute
-
Box, G.E.P., and Jenkins, G.M., (1963) Further contributions to adaptive quality control simultaneous estimation of dynamics nonzero costs. Bulletin of the International Statistical Institute, 34, 943–974.
-
(1963)
Further contributions to adaptive quality control simultaneous estimation of dynamics nonzero costs
, vol.34
, pp. 943-974
-
-
Box, G.E.P.1
Jenkins, G.M.2
-
6
-
-
84893529721
-
Statistical process monitoring and feedback adjustment-a discussion
-
Box, G.E.P., and Kramer, T., (1992) Statistical process monitoring and feedback adjustment-a discussion. Technometrics, 34, 251–267.
-
(1992)
Technometrics
, vol.34
, pp. 251-267
-
-
Box, G.E.P.1
Kramer, T.2
-
7
-
-
0003643108
-
-
John Wiley and Sons, New York, NY
-
Box, G.E.P., and Lucen¯o, A., (1997) Statistical Control by Monitoring and Feedback Adjustment, John Wiley and Sons, New York, NY.
-
(1997)
Statistical Control by Monitoring and Feedback Adjustment
-
-
Box, G.E.P.1
Lucen¯o, A.2
-
8
-
-
84887280274
-
Run by run process control combining SPC and feedback control
-
Sachs, E., Hu, A., and Ingolfsson, A., (1995) Run by run process control combining SPC and feedback control. IEEE Transactions on Semiconductor Manufacturing, 8 (1), 26–43.
-
(1995)
IEEE Transactions on Semiconductor Manufacturing
, vol.8
, Issue.1
, pp. 26-43
-
-
Sachs, E.1
Hu, A.2
Ingolfsson, A.3
-
9
-
-
0000272513
-
Design of exponentially weighted moving average schemes
-
Crowder, S.V., (1989) Design of exponentially weighted moving average schemes. Journal of Quality Technology, 21, 155–162.
-
(1989)
Journal of Quality Technology
, vol.21
, pp. 155-162
-
-
Crowder, S.V.1
-
10
-
-
0025387954
-
Exponentially weighted moving average control schemes properties and enhancements
-
Lucas, J.M., and Sacucci, M.S., (1990) Exponentially weighted moving average control schemes properties and enhancements. Technometrics, 32, 1–12.
-
(1990)
Technometrics
, vol.32
, pp. 1-12
-
-
Lucas, J.M.1
Sacucci, M.S.2
-
11
-
-
0022045775
-
Internal model control. 2. design procedure for multivariate systems
-
Garcia, C.E., and Morari, M., (1985) Internal model control. 2. design procedure for multivariate systems. Industrial Engineering, Chemical Design and Development, 24, 472–484.
-
(1985)
Industrial Engineering, Chemical Design and Development
, vol.24
, pp. 472-484
-
-
Garcia, C.E.1
Morari, M.2
-
12
-
-
0000407245
-
Stability and sensitivity of an EWMA controller
-
Ingolfsson, A., and Sachs, E., (1993) Stability and sensitivity of an EWMA controller. Journal of Quality Technology, 25, 271–287.
-
(1993)
Journal of Quality Technology
, vol.25
, pp. 271-287
-
-
Ingolfsson, A.1
Sachs, E.2
-
14
-
-
0028425441
-
Supervisory run-to-run control of a polysilicon gate etch using in situ Ellipsometry
-
Butler, S.W., and Stefani, J.A., (1994) Supervisory run-to-run control of a polysilicon gate etch using in situ Ellipsometry. IEEE Transactions on Semiconductor Manufacturing, 7, 193–201.
-
(1994)
IEEE Transactions on Semiconductor Manufacturing
, vol.7
, pp. 193-201
-
-
Butler, S.W.1
Stefani, J.A.2
-
15
-
-
0031124332
-
Run to run process control a review and some extensions
-
Del Castillo, E., and Hurwitz, A., (1997) Run to run process control a review and some extensions. Journal of Quality Technology, 29, 184–196.
-
(1997)
Journal of Quality Technology
, vol.29
, pp. 184-196
-
-
Castillo, E.1
Hurwitz, A.2
-
16
-
-
0004311217
-
-
Holden Day, Oakland, CA
-
Box, G.E.P., and Jenkins, G.M., (1976) Time Series Analysis, Forecasting, and Control, Holden Day, Oakland, CA.
-
(1976)
Time Series Analysis, Forecasting, and Control
-
-
Box, G.E.P.1
Jenkins, G.M.2
-
17
-
-
0003545748
-
-
3rd edn., Prentice Hall, Upper Saddle River, New Jersey
-
Åström, K.J., and Wittenmark, B., (1997) Computer Controlled Systems, Theory and Design, 3rd edn., Prentice Hall, Upper Saddle River, New Jersey.
-
(1997)
Computer Controlled Systems, Theory and Design
-
-
Åström, K.J.1
Wittenmark, B.2
-
19
-
-
0029409490
-
Modeling of chemical-mechanical polishing a review
-
Nanz, G., and Camilletti, L.E., (1995) Modeling of chemical-mechanical polishing a review. IEEE Transactions on Semiconductor Manufacturing, 8 (4), 382–389.
-
(1995)
IEEE Transactions on Semiconductor Manufacturing
, vol.8
, Issue.4
, pp. 382-389
-
-
Nanz, G.1
Camilletti, L.E.2
-
20
-
-
0030394043
-
A multivariate self-tuning controller for run-to-run process control under shift and trend disturbances
-
Del Castillo, E., (1996) A multivariate self-tuning controller for run-to-run process control under shift and trend disturbances. IIE Transactions, 28 (12), 1011–1021.
-
(1996)
IIE Transactions
, vol.28
, Issue.12
, pp. 1011-1021
-
-
Castillo, E.1
-
21
-
-
0003727497
-
-
2nd edn., Prentice Hall, Upper Saddle River, NJ
-
Ogata, K., (1995) Discrete-Time Control Systems, 2nd edn., Prentice Hall, Upper Saddle River, NJ.
-
(1995)
Discrete-Time Control Systems
-
-
Ogata, K.1
-
22
-
-
0004294559
-
-
John Wiley and Sons, New York, NY, Ch. 6
-
Myers, R.H., and Montgomery, D.C., (1995) Response Surface Methodology, John Wiley and Sons, New York, NY, Ch. 6.
-
(1995)
Response Surface Methodology
-
-
Myers, R.H.1
Montgomery, D.C.2
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