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Volumn 31, Issue 12, 1999, Pages 1157-1169

Long run and transient analysis of a double EWMA feedback controller

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Indexed keywords


EID: 77949435064     PISSN: 0740817X     EISSN: 15458830     Source Type: Journal    
DOI: 10.1080/07408179908969916     Document Type: Article
Times cited : (11)

References (22)
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  • 2
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    • The exponentialy weighted moving average
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  • 3
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  • 4
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    • (1978) Technometrics , vol.20 , Issue.1 , pp. 85-93
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  • 6
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    • Box, G.E.P., and Kramer, T., (1992) Statistical process monitoring and feedback adjustment-a discussion. Technometrics, 34, 251–267.
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    • Box, G.E.P.1    Kramer, T.2
  • 9
    • 0000272513 scopus 로고
    • Design of exponentially weighted moving average schemes
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    • Crowder, S.V.1
  • 10
    • 0025387954 scopus 로고
    • Exponentially weighted moving average control schemes properties and enhancements
    • Lucas, J.M., and Sacucci, M.S., (1990) Exponentially weighted moving average control schemes properties and enhancements. Technometrics, 32, 1–12.
    • (1990) Technometrics , vol.32 , pp. 1-12
    • Lucas, J.M.1    Sacucci, M.S.2
  • 12
    • 0000407245 scopus 로고
    • Stability and sensitivity of an EWMA controller
    • Ingolfsson, A., and Sachs, E., (1993) Stability and sensitivity of an EWMA controller. Journal of Quality Technology, 25, 271–287.
    • (1993) Journal of Quality Technology , vol.25 , pp. 271-287
    • Ingolfsson, A.1    Sachs, E.2
  • 14
    • 0028425441 scopus 로고
    • Supervisory run-to-run control of a polysilicon gate etch using in situ Ellipsometry
    • Butler, S.W., and Stefani, J.A., (1994) Supervisory run-to-run control of a polysilicon gate etch using in situ Ellipsometry. IEEE Transactions on Semiconductor Manufacturing, 7, 193–201.
    • (1994) IEEE Transactions on Semiconductor Manufacturing , vol.7 , pp. 193-201
    • Butler, S.W.1    Stefani, J.A.2
  • 15
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    • Run to run process control a review and some extensions
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  • 20
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    • A multivariate self-tuning controller for run-to-run process control under shift and trend disturbances
    • Del Castillo, E., (1996) A multivariate self-tuning controller for run-to-run process control under shift and trend disturbances. IIE Transactions, 28 (12), 1011–1021.
    • (1996) IIE Transactions , vol.28 , Issue.12 , pp. 1011-1021
    • Castillo, E.1
  • 21
    • 0003727497 scopus 로고
    • 2nd edn., Prentice Hall, Upper Saddle River, NJ
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    • Ogata, K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.