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Volumn 81, Issue 2, 2010, Pages

Investigation of fringe plasma parameters on a high power rf driven ion source

Author keywords

[No Author keywords available]

Indexed keywords

BEAM EXTRACTION; FLOATING POTENTIALS; HIGH-POWER; ION SATURATION CURRENT; ION-ION PLASMAS; LANGMUIR PROBE ANALYSIS; PLASMA PARAMETER; PROBE CHARACTERISTICS;

EID: 77949287415     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3277206     Document Type: Conference Paper
Times cited : (22)

References (10)
  • 4
    • 33750580461 scopus 로고    scopus 로고
    • Basics of plasma spectroscopy
    • DOI 10.1088/0963-0252/15/4/S01, PII S0963025206124974, S01
    • U. Fantz, Plasma Sources Sci. Technol. 0963-0252 15, S137 (2006). 10.1088/0963-0252/15/4/S01 (Pubitemid 44679438)
    • (2006) Plasma Sources Science and Technology , vol.15 , Issue.4
    • Fantz, U.1
  • 9
    • 36149021134 scopus 로고
    • 0096-8250. 10.1103/PhysRev.98.317
    • A. Simon, Phys. Rev. 0096-8250 98, 317 (1955). 10.1103/PhysRev.98.317
    • (1955) Phys. Rev. , vol.98 , pp. 317
    • Simon, A.1
  • 10
    • 67649856527 scopus 로고    scopus 로고
    • 0963-0252. 10.1088/0963-0252/18/2/025033
    • A. Fruchtman, Plasma Sources Sci. Technol. 0963-0252 18, 025033 (2009). 10.1088/0963-0252/18/2/025033
    • (2009) Plasma Sources Sci. Technol. , vol.18 , pp. 025033
    • Fruchtman, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.