Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity

Applied Physics Letters

Volumn 96, Issue 8, 2010, Pages

  Thiruvenkatanathan, P ^a   Yan, J ^a   Woodhouse, J ^a   Aziz, A ^a   Seshia, A A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ADDED MASS; EIGENSTATES; ELECTRICAL SPRING; ELECTRICALLY TUNABLE; MASS SENSOR; MEMS RESONATORS; MICRO-ELECTRO-MECHANICAL; MODE LOCALIZATION; PARAMETRIC SENSITIVITY; RELATIVE SHIFT; RESONANT FREQUENCIES; RESONANT FREQUENCY SHIFT; THREE ORDERS OF MAGNITUDE; ULTRASENSITIVE; VIBRATION CONFINEMENT; VOLTAGE-CONTROLLED;

MEMS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; RESONATORS;

SENSORS;

EID: 77749239695     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3315877     Document Type: Article

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