Experimental study on the quality of material surface applied laser-chemical combined etching

Zhongguo Jiguang/Chinese Journal of Lasers

Volumn 37, Issue 1, 2010, Pages 281-283

  Yuan, Genfu ^a   Yao, Yansheng ^a   Chen, Xuehui ^a   Liang, Huaqi ^a   Zhu, Shaofeng ^a  

^a ANHUI JIANZHU UNIVERSITY   (China)

Author keywords

Chemical etching; Combined processing; Laser processing; Laser technique; Surface quality

Indexed keywords

CHEMICAL ETCHING; COMBINED PROCESSING; LASER PROCESSING; LASER TECHNIQUE; SURFACE QUALITIES;

DENSITY OF LIQUIDS; ETCHING; MACHINING; PULSE REPETITION RATE; PULSED LASER APPLICATIONS; SLAGS; SURFACE PROPERTIES; SURFACE ROUGHNESS;

LASER CHEMISTRY;

EID: 77649292651     PISSN: 02587025     EISSN: None     Source Type: Journal    
DOI: 10.3788/CJL20103701.0281     Document Type: Article

References (5)

1. Chen Yuanlong, Xu Bichao, Yuan Genfu et al.. Laser-chemical combined machining technology status and development for Hard-to-Cut materials [C]. 2007 Annual Meeting Proceedings of Chinese Mechanical Engineering Society, China Machine Press, 2007(11)
2. Genfu Yuan, Yansheng Yao, Shaofeng Zhu et al.. The development of laser-chemical combined large scale etching on difficult-to-cut materials[C]. 3rd Pacific International Congress on Applications of Lasers and Optics(PICALO), April 16-18, 2008, Beijing
3. 3 ceramics[J]. Chinese J. Lasers, 2003, 30(5): 467-470
4. Yuan Genfu. Mechanism research and application of pulse laser milling[J]. Chinese J. Lasers, 2007, 34(S1): 250-253
5. Yuan Genfu, Zeng Xiaoyan. Experimental study of laser milling of silicon wafer[J]. Laser Technology, 2003, 27(5): 460-462