High-sensitivity and high-resolution low-energy ion scattering

Vacuum

Volumn 84, Issue 8, 2010, Pages 1005-1007

  Brongersma, Hidde H ^a,b,e   Grehl, Thomas ^b   van Hal, Paul A ^d   Kuijpers, Niels C W ^a   Mathijssen, Simon G J ^d   Schofield, Emma R ^c   Smith, Richard A P ^c   ter Veen, Hendrik R J ^e  

^a Calipso BV   (Netherlands)

^b UNIVERSITY OF MÜNSTER   (Germany)

^c JOHNSON MATTHEY TECHNOLOGY CENTRE   (United Kingdom)

^d PHILIPS RESEARCH LABORATORIES   (Netherlands)

^e TASCON GMBH   (Germany)

Author keywords

Depth resolution; High sensitivity; LEIS; Mass resolution; Quantitative; Self assembled monolayer

Indexed keywords

ALKANETHIOLS; ATOMIC COMPOSITIONS; ATOMIC LAYER; CARBON ATOMS; DEPTH DISTRIBUTION; DEPTH RESOLUTION; ENERGY DETECTION; HIGH RESOLUTION; HIGH SENSITIVITY; HIGH-K DIELECTRIC; ION SCATTERING; LOW-ENERGY ION SCATTERING; MASS RESOLUTION; TIME OF FLIGHT; TOROIDAL ENERGY; ULTRA-THIN;

ATOMS; BIOSENSORS; ELECTRON ENERGY LEVELS; IONS; ORGANIC POLYMERS; PLASMA INTERACTIONS; PLATINUM; SCATTERING;

SELF ASSEMBLED MONOLAYERS;

EID: 77649237537     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.11.016     Document Type: Article

References (4)

1. Brongersma H.H., Draxler M., De Ridder M., and Bauer P. Surface composition analysis by low-energy ion scattering. Surf Sci Repts 62 (2007) 63-109
2. www.iontof.com
3. Ter Veen H.R.J., Kim T., Wachs I.E., and Brongersma H.H. Applications of high sensitivity low energy ion scattering (HS-LEIS) in heterogeneous catalysis. Catalysis Today 140 (2009) 197-201
4. Biloen P., Bouwman R., Van Santen R.A., and Brongersma H.H. Surface composition of some selected group VIII/Au and group VIII/Sn alloys. Appl Surf Sci 2 (1979) 532-542