Depositing mechanism of metal oxide thin film in the liquid phase deposition process

ECS Transactions

Volumn 16, Issue 46, 2009, Pages 93-101

  Mizuhata, Minoru ^a   Saito, Yasuhiro ^a   Takagi, Mariko ^a   Deki, Shigehito ^a  

^a KOBE UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM OXIDE; ELECTRODEPOSITION; ELECTRODES; LIQUIDS; METALS; MOLECULAR STRUCTURE; SILICON; URANIUM METALLOGRAPHY; VANADIUM METALLOGRAPHY;

AL-METAL; AL2O3 POWDER; DEPOSITION PROCESS; EQUILIBRIUM REACTIONS; FLUOROSILICATE; LIQUID PHASE DEPOSITIONS (LPD); METAL OXIDE THIN FILMS; METAL OXIDES;

PHASE INTERFACES;

EID: 77649216762     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3169324     Document Type: Conference Paper

References (18)

1. S. Deki, Y. Aoi, O. Hiroi and A. Kajinami, Chem. Lett., 25, 433 (1996)
2. S. Deki, Y. Aoi and A. Kajinami, J. Mater. Sci., 32, 4269 (1997)
3. S. Deki, N. Yoshida, Y. Hiroe, K. Akamatsu, M.Mizuhata and A. Kajinami, Solid State Ionics, 151, (2002).
4. S.C. Lee, H.G. Yu, J.G. Yu and C.H. Ao, J. Cryst. Growth, 295, 60 (2006)
5. M.K. Lee, C.M. Shih, S.C. Fang, H.F. Tu and C.l. Ho, Jpn. J. Appl. Phys., 46, 1653 (2007).
6. S. Deki, A. Hosokawa, A. B. Béléké, and M. Mizuhata, Thin Solid Films, 517, 1546 (2009).
7. Y. Saito, Y. Sekiguchi, M. Mizuhata, S. Deki, J. Ceram. Soc. Jpn., 115, 855 (2007).
8. K. Kuratani, M. Uemura, M. Mizuhata, A. Kajinami, S. Deki, J. Am. Ceram. Soc., 88, 2923 (2005).
9. H. Nagayama, H. Honda and H. Kawahara, J. Electrochem. Soc., 127, 2013(1988).
10. A. Hishinuma, T. Goda, M. Kitaoka, S. Hayashi and H. Kawahara, Appl. Surf. Sci., 48/49, 405 (1991).
11. T. Ohta, K. Hara, T. Ishida, M. Hori and T. Goto, J. Appl. Phys., 94, 1428 (2003).
12. X. R. Ye and C. M. Wai, Chem. Mater., 15, 83 (2003).
13. L. Ciavatta, M. Iuliano and R. Porto, Polyhedron, 7, 1773 (1988)
14. H. C. Clark, K. R. Dixon and J. G. Nicolson, Inorg. Chem., 8, 450 (1968)
15. M. Mizuhata, Y. Saito, M. Takee, S. Deki, J. Ceram. Soc. Japan., in press.
16. P. A. Giguere and S. Turrell, J. Am. Chem. Soc,, 102, 5473 (1980).
17. R.H. Busey, ,E. Schwartz and R. E. Mesmer, Inorg. Chem., 19, 758 (1980)
18. S.M. Thomsen, J. Am. Chem. Soc., 74, 1690 (1952).