Examination of selective pulsed laser micropolishing on microfabricated nickel samples using spatial frequency analysis

Journal of Manufacturing Science and Engineering

Volumn 131, Issue 2, 2009, Pages 0210021-0210029

  Perry, Tyler L ^a   Werschmoeller, Dirk ^a   Duffie, Neil A ^a   Li, Xiaochun ^a   Pfefferkorn, Frank E ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

Nickel; Polishing; Pulsed laser; Surface roughness

Indexed keywords

FREQUENCY DOMAIN ANALYSIS; MICROFABRICATION; NEODYMIUM LASERS; NICKEL; POLISHING; SURFACE ROUGHNESS; SURFACE WAVES; YTTRIUM ALUMINUM GARNET;

AVERAGE SURFACE ROUGHNESS; CRITICAL FREQUENCIES; DOMINANT FREQUENCY; EXPERIMENTAL CONDITIONS; FINITE ELEMENT METHOD MODELS; MICROFABRICATION PROCESS; SPATIAL FREQUENCY ANALYSIS; SPATIAL FREQUENCY DOMAINS;

PULSED LASERS;

EID: 77649191148     PISSN: 10871357     EISSN: 15288935     Source Type: Journal    
DOI: 10.1115/1.3075874     Document Type: Article

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