Plastic substrate with gas barrier layer and transparent conductive oxide thin film for flexible displays

Thin Solid Films

Volumn 518, Issue 11, 2010, Pages 3089-3092

  Hanada, Toru ^a   Negishi, Tuyoto ^a   Shiroishi, Isao ^a   Shiro, Takashi ^a  

^a TEIJIN LTD   (Japan)

Author keywords

Flexible displays; Gas barrier; Plastic substrate; Sputtering; Transparent conductive oxide

Indexed keywords

DC MAGNETRON REACTIVE SPUTTERING; GAS BARRIER; GAS BARRIER LAYERS; HIGH TEMPERATURE; INDIUM ZINC OXIDES; INTRINSIC BIREFRINGENCE; PLASTIC SUBSTRATE; PLASTIC SUBSTRATES; RELATIVE HUMIDITIES; ROLL TO ROLL; THERMAL SHRINKAGE; TRANSPARENT CONDUCTIVE OXIDE THIN FILM; TRANSPARENT CONDUCTIVE OXIDES; TRANSPARENT CONDUCTIVE THIN FILMS; WATER VAPOR TRANSMISSION RATE;

AMORPHOUS FILMS; ATMOSPHERIC HUMIDITY; DIMENSIONAL STABILITY; FLEXIBLE DISPLAYS; GASES; INDIUM; OXYGEN; PLASTICS; SILICON COMPOUNDS; SILICON OXIDES; SUBSTRATES; SURFACE ROUGHNESS; THIN FILM DEVICES; THIN FILMS; WATER VAPOR; ZINC; ZINC OXIDE;

GAS PERMEABLE MEMBRANES;

EID: 77649113589     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.09.166     Document Type: Article

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