Fault detection based on statistical multivariate analysis and microarray visualization

IEEE Transactions on Industrial Informatics

Volumn 6, Issue 1, 2010, Pages 18-24

  Ma, Ming Da ^a   Wong, David Shan Hill ^b   Jang, Shi Shang ^b   Tseng, Sheng Tsaing ^b  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Fault detection; Microarray; Quality improvement; Semiconductor manufacturing; Wilcoxon rank sum test

Indexed keywords

ANALYSIS RESULTS; DNA MICRO-ARRAY; KEY VARIABLES; MANUFACTURING PROCESS; MULTI VARIABLES; MULTI VARIATE ANALYSIS; MULTI-STEP; P-VALUES; PROCESS OPERATION; QUALITY IMPROVEMENT; SEMICONDUCTOR MANUFACTURING; SINGLE VARIABLE; SYSTEMATIC METHOD; WILCOXON RANK-SUM TEST; WILCOXON RANK-SUM TESTS;

DECISION MAKING; MINING; MULTIVARIANT ANALYSIS;

FAULT DETECTION;

EID: 76849091689     PISSN: 15513203     EISSN: None     Source Type: Journal    
DOI: 10.1109/TII.2009.2030793     Document Type: Article

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