Temperature dependence of PECVD grown boron nitride film in MIS structure

AIP Conference Proceedings

Volumn 1203, Issue , 2010, Pages 870-874

  Özdemir, Orhan ^a   Bozkurt, Bora ^a   Yilmazer, Deneb ^a   Gökdemir, Pnar ^a   Kutlu, Kubilay ^a  

^a YILDIZ TECHNICAL UNIVERSITY   (Turkey)

Author keywords

Activation energy; Boron nitride; Capacitance temperature; Freeze out; Surface band bending

Indexed keywords

EID: 76749142094     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.3322574     Document Type: Conference Paper

References (3)

1. Muetterties E L, The Chemistry of Boron and its Compounds (New York: Wiley) 1967
2. Anutgan M, MSci Thesis Middle East Technical University, Ankara 2007
3. Orhan Özdemir, Mustafa Anutgan, Tamila Aliyeva-Anutgan, İsmail Atilgan and Bayram Katircioǧlu, Semicond. Sci. Technol. 23 (2008) 025006 (8pp)