Thermal properties of some volatile titanium (IV) precursors

ECS Transactions

Volumn 25, Issue 8 PART 1, 2009, Pages 557-560

  Filatov, E S ^a   Nizard, H ^b   Semyannikov, P P ^a   Sysoev, S V ^a   Trubin, S V ^a   Morozova, N B ^a   Zherikova, K V ^a   Gelfond, N V ^a  

^a NIKOLAEV INSTITUTE OF INORGANIC CHEMISTRY   (Russian Federation)

^b AIRBUS GROUP INNOVATIONS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ETHOXIDES; HIGH TEMPERATURE MASS SPECTROMETRY; ISO-PROPOXIDE; SATURATED VAPOUR PRESSURE; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE; THERMAL ANALYSIS; THERMAL DECOMPOSITIONS; THERMAL PROPERTIES; THERMODYNAMIC PARAMETER; TITANIUM PRECURSORS; VAPORIZATION PROCESS;

MASS SPECTROMETRY; PYROLYSIS; THERMODYNAMIC PROPERTIES; THERMOGRAVIMETRIC ANALYSIS; TITANIUM; VAPORIZATION;

CHEMICAL VAPOR DEPOSITION;

EID: 76549117723     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3207639     Document Type: Conference Paper

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