Surface modification of PMMA with DLC using RF-PECVD

ECS Transactions

Volumn 25, Issue 8 PART 2, 2009, Pages 829-836

  Barhai, P K ^a   Sharma, Rishi ^a   Yadav, Anoop Kr ^a   Singh, Ashwini Kr ^a   Gaur, Himani ^b   Buck, Volker ^b  

^a BIRLA INSTITUTE OF TECHNOLOGY   (India)

^b UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; BENDING MODES; CONSTANT PRESSURES; DEPOSITED FILMS; DLC FILM; EXTERNAL HEATING; FT-IR SPECTRUM; FTIR SPECTROSCOPY; OPTICAL CONTACT; RADIO FREQUENCY PLASMA; RAMAN SPECTRA; RF-PECVD; RF-POWER; STRETCHING MODES; SURFACE MODIFICATION; UNIFORM FILMS;

ACETYLENE; ARGON; ATOMIC FORCE MICROSCOPY; CONTACT ANGLE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LIGHTING; OPTICAL FILMS; PLASMA DEPOSITION; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SILICON SOLAR CELLS; SURFACE MORPHOLOGY;

CHEMICAL VAPOR DEPOSITION;

EID: 76549084602     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3207673     Document Type: Conference Paper

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