Replication technology for micro/nano optical components

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 8 B, 2004, Pages 5706-5716

  Kang, Shinill ^a  

^a Yonsei University   (South Korea)

Author keywords

Diffractive optical element; Hot embossing; Injection molding; Micro nano compression molding; Micro nano mold insert; Micro nano molding; Micro nano replication; Micro nano thermal forming; Microlens; Optical component; UV molding

Indexed keywords

COMPACTION; COSTS; DIFFRACTIVE OPTICS; DRY ETCHING; ELECTROFORMING; ELECTRON BEAM LITHOGRAPHY; INJECTION MOLDING; MICROMACHINING; SINTERING;

DIFFRACTIVE OPTICAL ELEMENT; HOT EMBOSSING; MICRO/NANO COMPRESSION MOLDING; MICRO/NANO MOLD INSERT; MICRO/NANO MOLDING; MICRO/NANO REPLICATION; MICRO/NANO THERMAL FORMING; MICROLENS; OPTICAL COMPONENT; UV-MOLDING;

COMPRESSION MOLDING;

EID: 7644233280     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.5706     Document Type: Conference Paper

References (85)

1. S. Sinzinger and J. Jahns: Microoptics (WILEY-VCH, New York, 1999) Chap. 1, p. 3.
2. D. Daly: Microlens Arrays (Tayler & Francis, New York, 2001) Chap. 2, p. 7.
3. Z. D. Popovic, R. A. Sprague and G. A. Neville Connell: Appl. Opt. 27 (1988) 1281.
4. T. R. Jay, M. B. Stern and R. E. Knowlden: Miniature & Micro-Opt. 1751 (1992) 236.
5. M. C. Hutley, R. F. Stevens and D. Daly: IEE Colloquium on Optical Connection, Optical Connection and Switching Network for Communication and Computing, (The Institution of Electrical Engineers, London, UK, 1990) p. 11/1.
6. D. Daly, R. F. Stevens, M. C. Hutley and N. Davies: Meas. Sci. Technol. 1 (1990) 759.
7. N. Nordman and O. Nordman: Opt. Eng. 40 (2001) 2572.
8. Y. S. Lin, C. T. Pan, K. L. Lin, S. C. Chen, J. J. Yang and J. R. Yang: 14th IEEE Int. Conf. Micro Electro Mechanical Systems (IEEE Instrumentation and Measurement Society, Interlaken, Switzerland, 2001) p. 337.
9. P. Heremans, J. Genoe, M. Kuijk, R. Vounckx and G. Borghs: IEEE Photon. Technol. 9 (1997) 1041.
10. M. Oikawa and K. Iga: Appl. Opt. 21 (1982) 1052.
11. J. Camacho and D. Tentori: J. Opt. A 3 (2001) 89.
12. T. Fujita, H. Nishihara and J. Koyama: Opt. Lett. 6 (1981) 613.
13. T. Fujita, H. Nishihara and J. Koyama: Opt. Lett. 7 (1982) 578.
14. S. V. Babin and V. A. Danilov: Opt. Laser Eng. 29 (1998) 307.
15. T. J. Sukeski and D. C. O'Shea: Appl. Opt. 34 (1995) 7507.
16. W. Daschner, P. Long, M. Larsson and S. H. Lee: J. Vac. Sci. & Technol. B 13 (1995) 2729.
17. W. Daschner, P. Long, R. Stein, C. Wu and S. H. Lee: J. Vac. Sci. & Technol. B 14 (1996) 3730.
18. S. Mihailov and S. Lazare: Appl. Opt. 32 (1993) 6211.
19. H. M. Presby, A. F. Benner and C. A. Edwards: Appl. Opt. 29 (1990) 2692.
20. I. Zergioti, S. Mailis, N. Vainos, A. Ikiades and C. P. Grigoropoulos: Appl. Surf. Sci. 138-139 (1999) 82.
21. K. Zimmer, D. Hirsch and F. Bigl: Appl. Surf. Sci. 96-98 (1996) 425.
22. R. J. Winfield, M. Meister, G. M. Crean and S. Paineau: Mater. Sci. Semicond. Process, 3 (2000) 481.
23. G. P. Behrmann and M. T. Duignan: Appl. Opt. 36 (1997) 4666.
24. X. Wang, J. R. Leger and R. H. Rediker: Appl. Opt. 36 (1997) 4660.
25. N. George and J. W. Matthews: Appl. Phys. Lett. 9 (1966) 212.
26. D. H. Close: Opt. Eng. 14 (1975) 408.
27. S. T. Chou, P. R. Krauss and P. J. Renstrom: Appl. Phys. Lett. 67 (1995) 3114.
28. J. R. Magarinos and D. J. Coleman: Opt. Eng. 24 (1985) 769.
29. J. J. Cowan: Opt. Eng. 24 (1985) 796.
30. F. W. Ostermayer, Jr., P. A. Kohl and R. H. Burton: Appl. Phys. Lett. 43 (1983) 642.
31. D. A. Fletcher, K. B. Crozier, K. W. Guarini, S. C. Minne, G. S. Kino, C. F. Quate and K. E. Goodson: J. Microelectromech. S. 10 (2001) 450.
32. L. Erdmann and D. Efferenn: Opt. Eng. 36 (1997) 1094.
33. M. B. Stern, M. Holz, S. S. Medeiros and R. E. Knowlden: J. Vac. Sci. & Technol. B 9 (1991) 3117.
34. M. B. Stern: Microelectron. Eng. 32 (1996) 369.
35. M. B. Stern and T. Jay: Opt. Eng. 33 (1994) 3547.
36. M. B. Stern: Microelectron. Eng. 34 (1997) 299.
37. J. Vukusic, J. Bengtsson, M. Ghisoni, A. Larsson, C. F. Carlstom and G. Landgren: Appl. Opt. 39 (2000) 398.
38. J. Bengtsson, N. Eriksson and A. Larsson: Appl. Opt. 35 (1996) 801.
39. I. N. Mail, A. Scherer, O. Dial, D. W. Prather and X. Gao: Opt. Lett. 25 (2000) 381.
40. C. David: Microelectron. Eng. 53 (2000) 677.
41. R. Steingruber and M. Ferstl: Microelectron. Eng. 53 (2000) 539.
42. M. Kubo and M. Hanabusa: Appl. Opt. 29 (1990) 2755.
43. D. L. MacFarlane, V. Narayan, J. A. Tatum, W. R. Cos, T. Chen and D. J. Hayes: IEEE Photon. Tech. L. 6 (1994) 1112.
44. D. J. Hayes and W. R. Cox: Conf. Adhesive Joining and Coating Technology in Electronics Manufacturing (IEEE, 1998) p. 168.
45. N. F. Borrelli, D. L. Morse, R. H. Bellman and W. L. Morgan: Appl. Opt. 24 (1985) 2520.
46. M. Wakaki, Y. Komachi and G. Kanai: Appl. Opt. 37 (1998) 627.
47. S. Moon, S. Ahn, S. Kang, D. Choi and T. Je: Proc. SPIE 4592 (2001) 140.
48. L. Lee, M. Majadou, K. Koelling, S. Daunert, S. Lai, C. Koh, Y. Juang, Y. La and L. Yu: Biomed. Microdevices 3 (2001) 339.
49. C. Blough, M. Rossi, S. Mack and R. Michaels: Appl. Opt. 36 (1997) 4648.
50. Y. Yamagata and S. Morita: RIKEN Review 34 (2001) 6.
51. M. B. Fleming and M. C. Hutley: AppL Opt. 36 (1997) 4635.
52. A. Braun, K. Zimmer, B. Hosselbarth, J. Meinhardt, F. Bigle and R. Mehnert: Appl. Surf. Sci. 127-129 (1998) 911.
53. S. Moon, S. Kang and J. Bu: Opt. Eng. 41 (2002) 2267.
54. S. Kim, D. Kim and S. Kang: J. Microlith. Microfab. Microsyst. 2 (2003) 356.
55. X. Dumbravescu and M. Ilie: Porc. SPIE 3879 (1999) 264.
56. J. Taniguchi, Y. Tokono, I. Miyamoto, M. Komuro and H. Hiroshima: Nanotechnology 13 (2002) 592.
57. S. Moon, N. Lee and S. Kang: J. Micromech. Microeng. 13 (2003) 98.
58. M. T. Gale: Microelectron. Eng. 34 (1997) 321.
59. K. Reimer, R. Engelke, U. Hofmann, P. Merz, K. T. Kohlmann v. Platen and B. Wagnen Proc. SPIE 3879 (1999) 98.
60. S. Kim and S. Kang: J. Phys. D 36 (2003) 2451.
61. S. Kang, S. Kim, W. Choi and S. Ahn: to be presented in 2004 ICO Int. Conf. Optics & Photonics in Technology Frontier, Tokyo, Japan, 2004.
62. S. Kang: Korea Patent pending 10-2002-007956 (2002).
63. T. G. Harvey, D. Laidler, P. Summersgill, N. Carter, D. J. Bone, T. G. Ryan and G. McRobbie: IEE Colloquium on Microengineering and Optics (IEEE, London, UK, 1994) p. 10/1.
64. H. Becker and U. Heim: Proc. MEMS'99 (1999) p. 228.
65. F. Nikolajeff, S. Hard and B. Curtis: Appl. Opt. 36 (1997) 8481.
66. C. T. Pan: J. Micromech. Microeng. 14 (2004) 471.
67. M. Heckele and W. K. Schomburg: J. Micromech. Microeng. 14 (2004) R1.
68. S. Y. Chou, P. R. Krauss and P. J. Renstrom: Appl. Phys. Lett. 67 (1995) 3114.
69. K. Jung, H. Kim, N. Park, S. Kang and Y. Park: 2003 JSME-IIP/ASME-ISPS Joint Conf. Micromechatronics for Information and Precision Equipment, Yokohama, Japan, 2003, p. 265.
70. N. Tanigami, S.Ogata, S.Aoyama, T. Yamashita and K. Imanaka: IEEE Photon. Tech. L. 1 (1989) 384.
71. M. V. Kunnavakkam, F. M. Houlihan, M. Schlax, J. A. Liddle, P. Kolodner, O. Nalamasu and J. A. Rogers: Appl. Phys. Lett. 82 (2003) 1152.
72. P. Nussbaum, I. Philipoussis, A. Husser and H. P. Herzig: Opt. Eng. 37 (1998) 1804.
73. P. Dannberg, G. Mann, L. Wagner and A. Brauer: Proc. SPIE 4175 (2000) 137.
74. P. Dannberg, R. Bierbaum, L. Erdmann and A. Brauer: Proc. SPIE 3631 (1999) 244.
75. E. J. K. Versiegen, J. H. P. Faasen, H. R. Stapert, P. C. Duineveld and J. G. Kloosterboer: J. Appl. Polym. Sci. 90 (2003) 2364.
76. St. Rudschuck, D. Hirsch, K. Zimmer, K. Otte, A. Braun, R. Mehnert and F. Bigl: Microelectron. Eng. 53 (2000) 557.
77. K. K. Baikerikar and A. B. Scranton: Polymer 42 (2001) 431.
78. J. Sochtig, M. Rossi and S. Westenhofer IEEE Leos Summer Top. Meet., Monterey, CA, USA, 1998, p. 37.
79. R. Wimerger-Friedl: ANTEC'99 (1999) 476.
80. S. Y. Kim, M. H. Rim, W. S. Lim and W. Y. Kim: ANTEC'99 (1999) p. 500.
81. S. Kang, I. Kim and H. Kim: Opt. Eng. 39 (2000) 689.
82. B. H. Kim and N. P. Suh: Polym.-Plast. Technol. 25 (1986) 73.
83. M. J. Liou and N. P. Suh: Polym. Eng. Sci. 29 (1989) 441.
84. B. Kim and M. F. Niemeyer: U.S. Patent No. 5,458,818. (1995).
85. Y. Kim, K. Seong and S. Kang: Opt. Eng. 41 (2002) 2276.